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AMETEK Materials Analysis Division
CAMECA Semiconductor Applications
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Metrology Tools for Semiconductors

Capitalizing on decades of leadership and expertise in designing micro-analysis instrumentation for research, CAMECA is driven by the same scientific excellence to develop high performance process control systems for the semiconductor manufacturing industry.
Our metrology product line includes both in-line and near-line, through-the-wall tools.


  • Shallow Probe EX-300: LEXES-based metrology tool for front-end process issues at 32nm node and beyond

Near-line, through-the wall

  • IMS Wf: full-wafer magnetic sector SIMS, optimized for ultra shallow implant control

CAMECA general brochure for downloadFor free download:
CAMECA company brochure 6 pages

"From Scientific Instruments for Research to Metrology Tools for Semiconductors"  
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES - ICP-MS - GD-MS - TIMS

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